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AQNMOL Prof. Jihoon Lee at Kwangwoon University, 광운대학교 전자공학과 이지훈 교수
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RTP

 

 

 

 

 

 

Rapid thermal processing (RTP)

Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to high temperatures (over 1,000 °C) on a timescale of several seconds or less.

During cooling, however, wafer temperatures must be brought down slowly to prevent dislocations and wafer breakage due to thermal shock. Such rapid heating rates are often attained by high intensity lamps or lasers.

These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.

(Source: Wikipedia)

 

 

 

– Kwangwoon University –

 

Advanced Quantum-Nano Materials & Optoelectronics Laboratory

– University of Arkansas –

 


– Funding Agency & Centers –

– Journal Editorials –

 

Editorial Board Nanoscale Research Letters * IF 3.125 (JCR 2018) Springer New York, USA
Editorial Board Nanoscale Research Letters * IF 3.125 (JCR 2018) Springer New York, USA

 

Special Issue Editor Nanomaterials *IF 4.043 (JCR 2018) MDPI Basel, Switzerland
Special Issue Editor Nanomaterials *IF 4.043 (JCR 2018) MDPI Basel, Switzerland

 
Managing Editor 3D RESEARCH * ESCI, SCOPUS Springer New York, USA
Managing Editor 3D RESEARCH * ESCI, SCOPUS Springer New York, USA

– Research Highlight –

 

(Journal cover, The Journal of Physical Chemistry C) Volume 123 Issue 4 (2019)

 

(Journal cover, Journal of Nanoelectronics and Optoelectronics) Volume 13 Issue 6 (2018)

 

(Journal cover, Metals) Volume 7 Issue 11 (2017)

 

(Journal cover, CrystEngComm) Volume 18 Issue 19 (2016)
(Journal cover, CrystEngComm) Volume 18 Issue 19 (2016)

 

(Journal cover, CrystEngComm) Volume 16 Issue 21 (2014)
(Journal cover, CrystEngComm) Volume 16 Issue 21 (2014)

 

(Journal cover, Physica Status Solidi (a)) Volume 209 Issue 6 (2012)
(Journal cover, Physica Status Solidi (a)) Volume 209 Issue 6 (2012)

 

(Journal cover, Physica Status Solidi (a)) Volume 208 Issue 1 (2011)
(Journal cover, Physica Status Solidi (a)) Volume 208 Issue 1 (2011)

 

(Journal cover, IEEE Transactions on Nanotechnology) Volume 9 Issue 2 (2010)
(Journal cover, IEEE Transactions on Nanotechnology) Volume 9 Issue 2 (2010)

 

(Materials Views, Wiley's Material Science) "Nano Rings and Nano Pyramids" (2010)
(Materials Views, Wiley’s Material Science) “Nano Rings and Nano Pyramids” (2010)

 

(Journal cover, Physica Status Solidi (a) Volume 207 Issue 2 (2010)
(Journal cover, Physica Status Solidi (a) Volume 207 Issue 2 (2010)

 

(Journal cover, Applied Physics Letters) Volume 89 Issue 20 (2006)
(Journal cover, Applied Physics Letters) Volume 89 Issue 20 (2006)

 

(2006 MRS Fall Meeting Scene)
(2006 MRS Fall Meeting Scene) “Self-Assembly of InGaAs Quantum Dot Molecules (QDMs)” (2006)

 

(Journal cover, Applied Physics Letters) Volume 88 Issue 23 (2006)
(Journal cover, Applied Physics Letters) Volume 88 Issue 23 (2006)

 

(NanoWerk, Spotlight)
(NanoWerk, Spotlight) “Quantum dot necklaces and other QD chains” (April 12, 2006)

 

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